Department of Engineering Sciences

Gas sensor in nano-scale

The project is focused on development of gas sensor using one dimensional material of metal oxide. The work involves development of methods for fabrication of nano-rods and nano-wires as sensing material, as well as MEMS design and fabrication of sensor devices.

Important goals for the gas sensors are stable function, high sensibility, and low power consumption that enable use in portable devices and integration into other MEMS systems.

People involved: Hugo Nguyen and Mingzhi Jiao.